diff --git a/target/device/Atmel/atngw100/target_skeleton/sys/.empty b/target/device/Atmel/atngw100/target_skeleton/sys/.empty
new file mode 100644
index 0000000000..e69de29bb2
diff --git a/target/device/Atmel/atstk100x/target_skeleton/sys/.empty b/target/device/Atmel/atstk100x/target_skeleton/sys/.empty
new file mode 100644
index 0000000000..e69de29bb2
diff --git a/target/device/Atmel/root/target_skeleton/sys/.empty b/target/device/Atmel/root/target_skeleton/sys/.empty
new file mode 100644
index 0000000000..e69de29bb2